PRODUCT

PRODUCT

RF FILTER

RF FILTER

[Quantum] AC Filter

FeaturesHigh Impedance & High Rejection Characteristics

-High Quality RF Filter for TTTM(Tool To Tool Matching)

-Customized Design

ApplicationsGenerally Applied When RF Power and AC Heater are used together

-Semiconductor Equipment PECVD, ALD, ETCH

-Research or Industrial Equipment

Detail

SPECIFICATIONS [Main Filter Module]
Parameters
Frequency Range Selectable [EX. 27.12MHz]
RF Input Impedance [IZI mag] Min. 1KΩ
Rejection at RF [S21] Max. -45dB
Power Rating
Allowable Current Max. 10A
Operating Voltage Max. 220Vac
Connector
AC Input Connector 1-178138-3 [D3200] 4Port (A, B, C, D)
AC Output Connector 1-178138-3 [D3200] 4Port (A, B, C, D)
Fan Connector (Male) Housing [206061-1] / Terminal [2-66102-5] [1, +24VDC] [2, Ground] [3, Fan1 Alarm] [4, Fan2 Alarm] @Open Collector Type
Physical
Size [Next Page] Customize
Environmental & Cooling
Operating Temperature +5ºC ~ +40ºC
Cooling [Fan] 24VDC @Max. 1A